一种改善非晶硅薄膜光致衰退效应的装置

Device for improving optical-induced degradation of amorphous silicon membrane

Abstract

The utility model discloses a device for improving optical-induced degradation of an amorphous silicon membrane. The device comprises a hot filament chemical vapor deposition vacuum chamber and a vacuum pump; a mixed gas intake duct is mounted at the top of the vacuum chamber; a heating wire used for decomposing mixed gases and an electric heater used for heating a glass lining are arranged in the vacuum chamber; a xenon lamp similar to solar spectrum is respectively mounted at the inner wall of two opposite sides in the vacuum chamber and used for continuously irradiating the deposition course of the intrinsic amorphous silicon membrane; and the xenon lamp is mounted higher than an upper surface of the glass lining. In a hot filament chemical vapor deposition, the xenon lamp similar to solar spectrum is used for irradiating the whole forming process of the membrane, then similar illumination resistance of the membrane is trained, so that the illumination stability of the formed membrane is improved; and under the illumination, microstructures in the membrane are converted to a trend in favor of resisting illumination degradation, so that the optical-induced degradation of the amorphous silicon membrane is improved.
本实用新型公开一种改善非晶硅薄膜光致衰退效应的装置,包括热丝化学气相沉积真空室及真空泵,真空室的顶部装有混合气体进气管道,真空室内部装有分解混合气体的电热丝和加热玻璃衬底的电加热器,在真空室内相对两侧的内壁上各装一个类太阳光谱的氙灯持续照射本征非晶硅薄膜的沉积过程,氙灯的安装位置高于玻璃衬底的上表面。通过在热丝化学气相沉积过程中,以类太阳光谱的氙灯持续照射薄膜形成的整个过程,薄膜在形成的整个过程经受类似耐光照性能的训练,提高薄膜成形后的光照稳定性能,在光照条件下,薄膜内部微结构向着有利于抗光照衰退的趋势转化,使得非晶硅薄膜光致衰退效应得到改善。

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    CN-102496663-AJune 13, 2012普乐新能源(蚌埠)有限公司Method for reducing attenuation rate of amorphous silicon solar cell
    CN-104795469-AJuly 22, 2015北京金晟阳光科技有限公司, 袁向东Roller-way-type solar cell irradiation annealing furnace
    CN-105765738-AJuly 13, 2016Tp太阳能公司用于减少太阳能电池的光致衰退的方法及设备